发明名称 METHOD FOR MANUFACTURING INTEGRATED CIRCUIT TIN FILM TRANSISTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide fluorene organic semiconductor material which shows superior transistor property and which does not require a special manufacturing method or special transistor structure. SOLUTION: The problem is solved by a thin film transistor device being fluorene oligomer in which a semiconductor layer has the molecule amount of under 2000 and which is constituted of one to ten fluorene ring units. Oligomer is deposited by simple vapor deposition and a desired semiconductor characteristic such as high mobility can be obtained, for example.
申请公布号 JP2002324931(A) 申请公布日期 2002.11.08
申请号 JP20020053546 申请日期 2002.02.28
申请人 LUCENT TECHNOL INC 发明人 BAO ZHENAN
分类号 H01L51/05;H01L27/28;H01L29/786;H01L51/00;H01L51/30;H01L51/40;(IPC1-7):H01L51/00 主分类号 H01L51/05
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