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发明名称
VERFAHREN ZUR HERSTELLUNG DÜNNER, SCHWER LÖSLICHER BESCHICHTUNGEN
摘要
申请公布号
DE50000568(D1)
申请公布日期
2002.10.31
申请号
DE20005000568
申请日期
2000.04.06
申请人
HAHN-MEITNER-INSTITUT BERLIN GMBH
发明人
FISCHER, CHRISTIAN-HERBERT;MUFFLER, HANS-JUERGEN;LUX-STEINER, CHRISTINA
分类号
C23C26/00;H01L21/368;H01L31/18;(IPC1-7):C23C26/00
主分类号
C23C26/00
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