发明名称 Field MOS transistor and semiconductor integrated circuit including the same
摘要 A field MOS transistor having a high withstand voltage is disclosed. An island region of an epitaxial layer is surrounded by a heavily-doped isolation layer and a lightly-doped isolation layer formed thereon. A channel region is formed in the island region so as to assume the same doping level as that of the lightly-doped isolation layer. A region is formed below the island region so as to assume the same doping level as that of the heavily-doped isolation layer, thus supplying a back gate voltage to the transistor. The channel formation region is formed simultaneously with formation of the lightly-doped isolation layer, and the region below the island region is formed simultaneously with the heavily-doped isolation layer. As a result, manufacturing processes can be simplified.
申请公布号 US6472710(B2) 申请公布日期 2002.10.29
申请号 US20010881805 申请日期 2001.06.18
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 TERASHIMA TOMOHIDE
分类号 H01L21/8234;H01L27/088;H01L29/10;H01L29/78;(IPC1-7):H01L31/113 主分类号 H01L21/8234
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