| 摘要 |
When a drive unit which drives a reticle stage accelerates or decelerates it, the reaction experienced by this drive unit is discharged to a floor FD via an actuator, an attached member, and a reaction frame. Vibration generated in the reaction frame at this time is detected by an acceleration sensor. A vibration cancellation control section determines a direction and thrust for driving a movable section to which a weight is fixed in order to quell vibration of the reaction frame detected by the acceleration sensor, and emits a control signal to a driver.
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