发明名称 GATE OVERLAP TYPE LDD POLYSILICON THIN FILM TRANSISTOR
摘要 PROBLEM TO BE SOLVED: To provide a gate overlap type LDD polysilicon TFT. SOLUTION: A gate overlap type LDD polysilicon TFT consists of a transparent insulation substrate 30, a polysilicon layer formed on the transparent insulation substrate and a gate insulation layer 40 formed in the polysilicon layer. The polysilicon layer has a channel region 38, an LDD structure 36 in a periphery of the channel region, and a source/ drain region 34 in a periphery of the LDD structure. A first gate layer 42 is subjected to pattern formation in the gate insulation layer, and is positioned over the channel region. A second gate layer 46 is subjected to pattern formation to the first gate layer and extended to cover a prescribed region of the gate insulation layer 40 and to cover the LDD structure 36.
申请公布号 JP2002313808(A) 申请公布日期 2002.10.25
申请号 JP20020014339 申请日期 2002.01.23
申请人 IND TECHNOL RES INST 发明人 CHIN SHIKIYOU
分类号 H01L29/43;H01L21/336;H01L29/423;H01L29/49;H01L29/786;(IPC1-7):H01L21/336 主分类号 H01L29/43
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