发明名称 PT-CO BASED SPUTTERING TARGETS
摘要 <p>A cobalt-chromium-boron-platinum sputtering target alloy having multiple phases. The alloy can include Cr, B, Ta, Nb, C, Mo, Ti, V, W, Zr, Zn, Cu, Hf, O, Si or N. The alloy is prepared by mixing Pt powder with a cobalt-chromium-boron master alloy, ball milling the powders and HIP'ing to densify the powder into the alloy.</p>
申请公布号 WO2002083974(A1) 申请公布日期 2002.10.24
申请号 US2002010909 申请日期 2002.04.08
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