MICRO PUMP

摘要

A micro pump capable of feeding fluid by the operation of a pressure, comprising at least one pump part, the pump part further comprising a pump unit, the pump unit further comprising at least one actuator part causing a pressure fluctuation and a flow passage part allowing the fluid to flow therethrough, wherein the actuator part is formed so that two side walls comprising piezoelectric/electrostriction bodies or antiferroelectrics are arranged on a communication plate and the faces of the side walls opposed to the communication plate are closed by a cover plate to form a cell to produce a pressure fluctuation in the flow passage part through the displacement of the cell caused by the extension and retraction of the side walls so as to form the flow passage of the fluid selectively.