发明名称 LABEL SHEET FOR CLEANING AND CONVEYING MEMBER HAVING CLEANING FUNCTION
摘要 A label sheet for cleaning is formed of a label (A) for cleaning including a cleaning layer (3) having a 180 DEG peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer (4) provided on one of surfaces of said cleaning layer (3), and a separator (1) on which the label (A) is removably provided through the adhesive layer (4).
申请公布号 WO02083332(A1) 申请公布日期 2002.10.24
申请号 WO2001JP03850 申请日期 2001.05.08
申请人 NITTO DENKO CORPORATION;NAMIKAWA, MAKOTO;TERADA, YOSHIO;NUKAGA, JIROU;TOYODA, EIJI 发明人 NAMIKAWA, MAKOTO;TERADA, YOSHIO;NUKAGA, JIROU;TOYODA, EIJI
分类号 A47L25/00;B08B7/00;C11D11/00;H01L21/00 主分类号 A47L25/00
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