发明名称 THIN FILM HAVING FINE PORE STRUCTURE AND METHOD FOR MANUFACTURING FINE PORE STRUCTURAL BODY
摘要 PROBLEM TO BE SOLVED: To prepare a thin film of a tin oxide meso structural body provided with a fine pore structure having high structural regularity and a crystalline fine pore wall, and to provide a manufacturing method thereof. SOLUTION: The thin film has the fine pore structure formed by containing an oxide, holds a surfactant in the fine pore and contains tin oxide crystal in the fine pore wall. The manufacturing method for the fine pore structural body has a process for preparing a reaction solution containing a metallic compound and the surfactant, a process for applying the reaction solution on a substrate and a process for holding the substrate in an atmosphere containing steam.
申请公布号 JP2002308623(A) 申请公布日期 2002.10.23
申请号 JP20020027055 申请日期 2002.02.04
申请人 CANON INC 发明人 OGAWA YOSHINORI;NOMA TAKASHI
分类号 C01G19/02;(IPC1-7):C01G19/02 主分类号 C01G19/02
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