发明名称 MOS SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a highly reliable MOS semiconductor device. SOLUTION: In this MOS semiconductor device, an insulator composed of an oxide film, nitride film, etc., formed by the CVD method is embedded in the overlapping section of a gate electrode and a source diffusion layer or a drain diffusion layer, so that no void is formed.
申请公布号 JP2002305252(A) 申请公布日期 2002.10.18
申请号 JP20020034033 申请日期 2002.02.12
申请人 SEIKO INSTRUMENTS INC 发明人 KITAMURA KENJI;OSANAI JUN;KOIWA YUKIO
分类号 H01L27/04;H01L21/822;H01L21/8234;H01L27/06;H01L29/78;(IPC1-7):H01L21/823 主分类号 H01L27/04
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