发明名称 |
THIN FILM RESISTOR HAVING TANTALUM PENTOXIDE MOISTURE BARRIER |
摘要 |
The present invention discloses a method of manufacturing a thin film resistor with a moisture barrier by depositing a metal film layer on a substrate and depositing a layer of tantalum pentoxide film overlaying the metal film layer. The present invention also includes a thin film resistor having a substrate; a metal film layer attached to the substrate; and a tantalum pentoxide layer overlaying the metal film layer, the tantalum pentoxide layer providing a barrier to moisture, the tantalum pentoxide layer not overlaid by an oxidation. |
申请公布号 |
WO02082474(A1) |
申请公布日期 |
2002.10.17 |
申请号 |
WO2001US12034 |
申请日期 |
2001.04.12 |
申请人 |
VISHAY DALE ELECTRONICS, INC.;VINCENT, STEPHEN, C. |
发明人 |
VINCENT, STEPHEN, C. |
分类号 |
H01C1/032;H01C7/00;H01C17/12 |
主分类号 |
H01C1/032 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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