| 摘要 |
An electromagnetically-excited silicon micromachined vibrating beam accelerometer includes a proof mass or pendulum attached to an outer casing by way of a pair of flexures defining a hinge axis HA. A double-ended tuning fork (DETF) is connected between the proof mass and the casing along an axis generally perpendicular to the hinge axis (HA) defining a sensitive axis SA such that forces applied along the hinge axis HA will cause the DETF to go into either compression or tension. Electromagnetic excitation causes the vibrating beams to vibrate at a resonant frequency when the proof mass is at rest. In response to a force along the sensitive axis SA, the vibrating beams go into either tension or compression resulting in a change in the resonant frequency which, in turn, is used as a measure of the force. The excitation includes a magnetic field B, applied in a direction generally perpendicular to the plane of the DETF and perpendicular to the sensitive axis SA. In order to eliminate the effects of variations in the resistance path of the vibrating beams due to either manufacturing tolerances and temperature, the DETF in accordance with the present invention is formed as a dual-port device with separate conducting paths for the drive circuit and the pick-off circuit. By providing separate conducting paths, the effects of changes in the resistance path of the drive circuit have little effect on the overall performance of the oscillator. Since the beams are separated, the DETFs are configured to provide sufficient mechanical coupling of the beams forming the DETF. |
