SILICON-CONTAINING ACETAL PROTECTED POLYMERS AND PHOTORESISTS COMPOSITIONS THEREOF,申请号WO2002US10639-传众专利搜索

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发明名称	SILICON-CONTAINING ACETAL PROTECTED POLYMERS AND PHOTORESISTS COMPOSITIONS THEREOF
摘要	A photoresist composition comprising at least one acetal polymer having a silicon substituent; provided that the silicon substituent is not directly attached to the acetal functionality, thereby providing high resolution, improved DOF, and improved dimensional stability under metrology conditions.
申请公布号	WO02082184(A1)	申请公布日期	2002.10.17
申请号	WO2002US10639	申请日期	2002.04.04
申请人	ARCH SPECIALTY CHEMICALS, INC.	发明人	BLAKENEY, ANDREW, JOSEPH;MALIK, SANJAY;DILOCKER, STEPHANIE;FERRI, JOHN;EISELE, JEFFERY
分类号	C08F8/42;C08F30/08;G03F7/004;G03F7/039;G03F7/075;G03F7/11;G03F7/26;H01L21/027;(IPC1-7):G03F7/004;C08F16/12;C08G77/20;C08G77/04;C08G77/00	主分类号	C08F8/42
代理机构		代理人
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