| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem of a long time required for a substrate exchanging operation in a substrate transportation to accurately perform the substrate exchanging operation in a short time. SOLUTION: A parallel link type upper and lower arms have parallel links 12, 15 and two spline shafts 33, 34 are connected to support points of the links 12, 15. A cam box 16 drives three output shafts by a single input to transfer an up-down driving force from one output shaft 32 among them at a substantially mid position between the spline shafts 33, 34, thereby accurately performing a substrate exchanging operation in a short time. |
