| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a ceramic heater, capable of preventing generation of cracks in the connection part of an oxide film for coating an aluminum nitride sintered body, forming a heating board with thermal stress and a heating resistor, and capable of generating heat stably over a long period of time, even after repeated rapid temperature increase and rapid cool down. SOLUTION: In the ceramic heater 10, one main face of the heating board 2 made of an aluminum nitride sintered body with an oxide film including Al over the entire surface is a heating face 3, the heating resistor 5 is formed on the other main face of the heating board 2, and an insulation film 4 is attached to the other main face of the heating board 2, to cover the heating resistor 5.</p> |
