发明名称 |
Silicon sliders with trapezoidal shape and drie process for fabrication |
摘要 |
A trapezoidal shaped silicon slider is described in the present invention. The slider has a first parallel surface larger than a second parallel surface, thereby generating a built-in positive pitch with respect to a recording medium when the slider is incorporated into a hard disk drive. The slider further includes round edges at the first parallel surface, longitudinal holes within its body, non-planar slanted side surfaces, and a rounded leading edge. The silicon, trapezoidal slider is fabricated using a deep reactive ion etching (DRIE) technique.
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申请公布号 |
US2002145827(A1) |
申请公布日期 |
2002.10.10 |
申请号 |
US20010835722 |
申请日期 |
2001.04.10 |
申请人 |
BUNCH RICHARD;CRAWFORTH LINDEN J.;RAZOUK ANTHONY A.;REILEY TIMOTHY C. |
发明人 |
BUNCH RICHARD;CRAWFORTH LINDEN J.;RAZOUK ANTHONY A.;REILEY TIMOTHY C. |
分类号 |
G11B5/60;(IPC1-7):G11B5/60 |
主分类号 |
G11B5/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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