发明名称 |
TEMPLATE FOR ROOM TEMPERATURE, LOW PRESSURE MICRO- AND NANO-IMPRINT LITHOGRAPHY |
摘要 |
<p>Described are imprint lithography templates, methods of forming and using the templates, and a template holder device. An imprint lithography template may include a body with a plurality of recesses on a surface of the body. The body may be of a material that is substantially transparent to activating light. At least a portion of the plurality of recesses may define features having a feature size less than about 250 nm. A template may be formed by obtaining a material that is substantially transparent to activating light and forming a plurality or recesses on a surface of the template. In some embodiments, a template may further include at least one alignment mark. In some embodiments, a template may further include a gap sensing area. An imprint lithography template may be used to form an imprinted layer in a light curable liquid disposed on a substrate. During use, the template may be disposed within a template holder. The template holder may include a body with an opening configured to receive the template, a support plate, and at least one piezo actuator coupled to the body. The piezo actuator may be configured to alter a physical dimension of the template during use.</p> |
申请公布号 |
WO02067055(A3) |
申请公布日期 |
2002.10.10 |
申请号 |
WO2001US42688 |
申请日期 |
2001.10.12 |
申请人 |
BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM |
发明人 |
CHOI, BYUNG, JIN;SREENIVASAN, S., V.;BAILEY, TODD;COLBURN, MATTHEW;WILLSON, C., GRANT;EKERDT, JOHN |
分类号 |
H01L21/027;B29C35/08;B29C37/00;G03F7/00;G03F9/00;(IPC1-7):G03F7/00;G03F1/00 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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