| 发明名称 |
METHOD OF MANUFACTURING A POLISHING PAD USING A BEAM |
| 摘要 |
The present invention provides a method of manufacturing a polishing pad using a beam, and a system incorporating the method. In one embodiment, the method includes providing a cake that is susceptible to beam ablation, and skiving a polishing pad from the cake using a beam apparatus configured to produce a beam.
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| 申请公布号 |
US2002144985(A1) |
申请公布日期 |
2002.10.10 |
| 申请号 |
US20010785636 |
申请日期 |
2001.02.16 |
| 申请人 |
CREVASSE ANNETTE M.;EASTER WILLIAM G.;MICELI FRANK |
发明人 |
CREVASSE ANNETTE M.;EASTER WILLIAM G.;MICELI FRANK |
| 分类号 |
B23K26/38;B24B37/04;B24D13/14;B24D18/00;(IPC1-7):B23K26/36 |
主分类号 |
B23K26/38 |
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