SELF-ALIGNED DUAL DAMASCENE ETCH USING A POLYMER,申请号KR1020027010239-传众专利搜索

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发明名称	SELF-ALIGNED DUAL DAMASCENE ETCH USING A POLYMER
摘要
申请公布号	KR20020076293(A)	申请公布日期	2002.10.09
申请号	KR1020027010239	申请日期	2002.08.08
申请人		发明人
分类号	H01L21/3205	主分类号	H01L21/3205
代理机构		代理人
主权项
地址

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