METHOD OF USING TITANIUM DOPED ALUMINUM OXIDE FOR PASSIVATION OF FERROELECTRIC MATERIALS AND APPARATUS USING THE SAME

摘要

PURPOSE: Apparatus of using a titanium-doped aluminum oxide for passivation of ferroelectric materials is provided to reduce stress and improve passivation properties by forming a passivation layer including a titanium-doped aluminum oxide layer for passivation of ferroelectric materials such as Pt/SBt/Ir-Ta-O devices. CONSTITUTION: A ferroelectric material is positioned between the first metal electrode and the second metal electrode. The passivation layer is located on the first metal electrode, including the titanium-doped aluminum oxide. The passivation layer has a thickness of at least 200 angstrom. The first metal electrode is platinum and the ferroelectric material includes strontium-bismuth-tantalate(SBT).