| 摘要 |
PURPOSE: A method for coating ceramics on the surface of quartz used for semiconductors or heaters is provided to maximize energy efficiency by blocking energy released outside. CONSTITUTION: The coating method is characterized in that ceramic coating layer, being 100-300micrometer in thickness, is formed on the surface of quartz, melting over a H2-O2 flame having a H2/O2 ratio of 1:3.0 or 1:4.0kg/cm¬2, by spraying ceramic powder. The ceramic powder with a 20-100micrometer size is obtained by sintering various ceramic raw materials at 1200-1800deg.C.
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