| 摘要 |
PURPOSE: A broadband design of a probe analysis system is provided to control a closed loop of the power supplied to a chamber to a degree that cannot be accomplished through a conventional technology by including a sampling unit that simultaneously samples the first plurality of frequencies from analog signals and by simultaneously sampling the second plurality of frequencies from the analog signals. CONSTITUTION: A sampling unit generates digital power signals based on a plurality of analog signals(28,30) that characterize power delivered from a radio frequency(RF) power delivery system to a plasma chamber. A digital process unit generates a digital spectrum signal based on the digital power signals. The sampling unit simultaneously samples the first plurality of frequencies from the analog signals such that the digital spectrum signal defines signal levels for the first plurality of frequencies.
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