| 摘要 |
PROBLEM TO BE SOLVED: To provide a neutral particle beam treatment device which can apply a large-bore beam to a substance to be treated, at low-cost and compact constitution, and is hard to damage the substance to be treated. SOLUTION: This neutral particle beam treatment device possesses a plasma generation beam 10 which generates positive ions and/or negative ions in plasma, a pair of electrodes 5 and 6 which face each other including the plasma generated by that plasma generation means, and a voltage source 102 which applies voltage between those electrodes. The above electrodes 5 and 6 in a pair accelerate the positive ions and/or negative ions generated by the above plasma generation means, and the positive ions or negative ions become neutral particles 4 being neutralized while flying within the plasma 7 between the electrode in a pair toward the substance to be treated, and the accelerated neutral particles are applied to the substance X to be treated through the electrode 6 on the side of the substance to be treated. |
