| 摘要 |
PROBLEM TO BE SOLVED: To provide spin treatment equipment which can discharge smoothly droplets which dripped on an upper surface of a turbulence preventing cover for preventing generation of turbulence due to rotation of a rotating body. SOLUTION: The spin treatment equipment which rotates and treats a substrate is provided with a rotating body 11, a control motor 4 for rotating and driving the rotating body 11, a holding member 18 which is disposed in the rotating body 11, holds a substrate and rotates it as an unified body with the rotating body 11, and a turbulence preventing cover 35 which is disposed in the rotating body 11 and has a plane type facing wall 36 facing a lower surface of the substrate held by the holding member at a prescribed interval. A slant part 36a which is lowly inclined from a radial direction center of the rotating body toward the outside is formed on the facing wall part 36.
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