HEAT TREATMENT APPARATUS,申请号JP20010089113-传众专利搜索

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发明名称	HEAT TREATMENT APPARATUS
摘要
申请公布号	JP2002289666(A)	申请公布日期	2002.10.04
申请号	JP20010089113	申请日期	2001.03.27
申请人	TOKYO ELECTRON LTD	发明人	TANIFUJI TAMOTSU;SAKATA KAZUNARI
分类号	F27D3/06;H01L21/205;H01L21/22;H01L21/31;H01L21/673;H01L21/677;H01L21/68;(IPC1-7):H01L21/68	主分类号	F27D3/06
代理机构		代理人
主权项
地址

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