| 摘要 |
PURPOSE: To develop an unreacted gas detection apparatus for safely supplying a feed gas by accurately detecting the concentration of a flammable unreacted gas that remains in a target gas. CONSTITUTION: The unreacted gas detection apparatus 40 comprises a furnace body for generating a target gas by allowing a flammable feed gas to react with a flame- supporting feed gas in a reaction chamber 18, a sensor body 44 that is connected to the furnace body, a space 46 for measurement that is formed in the sensor body 44 for circulating the target gas, a unreacted gas detection sensor 72 that arranges a temperature measurement section 72c having a catalysis layer 74 for accelerating reaction in the space for measurement, and a target gas temperature detection sensor 70 where a temperature measurement section 70c is arranged near the sensor body 44 or a channel in the furnace body member 20. The unreacted gas remaining in the target gas is allowed to react by the catalysis layer 74 for accelerating reaction for detecting the temperature increase in the temperature measurement section 72c, at the same time a target gas temperature T0 is measured by the temperature measurement section 70c, and the concentration of the unreacted gas is detected from a unreacted gas detection sensor temperature T and a temperature difference control of the target gas temperature.
|
