| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a mask case which is capable of sufficiently releasing the static electricity generated by contact of a mask with the mask case from the chromium film of the mask and is capable of well transporting the mask without allowing mask patterns to give rise to electrostatic discharge damage. SOLUTION: Fastening portions 9 are made larger in the contact area with the chromium film 3 at the corners of the mask 4, by which the mask 4 is fixed. At this time, >=1/19,600 of the mask area is needed for the contact area according to the inventor's experiment.</p> |
