| 摘要 |
A position sensing apparatus, for sensing switching positions in a MEMS device that includes a suspension structure, an actuator, and a support structure, is provided. The apparatus includes a first contact disposed on the suspension structure, a second contact coupled to the support structure, and an indicator coupled to one of the first and second contacts. When the first and second contacts are in contact, the indicator provides a first signal, and when the first and second contacts are not in contact, the indicator provides a second signal. |
