发明名称 Method of manufacturing an array substrate for a liquid crystal display device
摘要 A method of manufacturing an array substrate for a liquid crystal display device including the steps of forming a gate line and a gate electrode on a substrate by forming a metal material on the substrate and patterning it; forming a gate insulating layer on the substrate; forming an active layer and an ohmic contact layer on the gate insulating layer; forming a data line, a source electrode and a drain electrode on the substrate; forming a passivation layer by depositing an insulating material on the substrate, forming a drain contact hole by patterning the passivation layer, the drain contact hole exposing a part of the drain electrode; forming a transparent metal layer on the passivation layer; forming a photo-resist layer on the transparent metal layer; performing a light exposure process by disposing a mask over the photo-resist layer, the mask including a light blocking portion, a slit portion and a light transmission portion, and forming a pixel electrode by developing the photo-resist layer exposed to light and etching the exposed transparent metal layer.
申请公布号 US2002142505(A1) 申请公布日期 2002.10.03
申请号 US20020106551 申请日期 2002.03.27
申请人 HWANG KWANG-JO;KIM WOO-IYUN 发明人 HWANG KWANG-JO;KIM WOO-IYUN
分类号 G02F1/1343;G02F1/136;G02F1/1362;G02F1/1368;G09F9/30;G09F9/35;H01L21/336;H01L21/77;H01L21/84;H01L27/12;H01L29/423;H01L29/49;H01L29/786;(IPC1-7):H01L21/00 主分类号 G02F1/1343
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