发明名称 DYNAMIC ANGLE MEASURING INTERFEROMETER
摘要 Apparatus and method for interferometric measurement of a change in the relative directions of propagation of components of an optical beam, for interferometric measurement of a change in the direction of propagation of an optical beam (12), and for interferometric measurements of the change in orientation of an object.
申请公布号 WO0235177(A3) 申请公布日期 2002.10.03
申请号 WO2001US40613 申请日期 2001.04.26
申请人 ZYGO CORPORATION 发明人 HILL, HENRY, ALLEN
分类号 G01B9/02;G01B11/26 主分类号 G01B9/02
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