发明名称 |
PROBE FOR DETECTING OR PROJECTING EVANESCENT LIGHT, ITS MANUFACTURING METHOD, SURFACE OBSERVATION DEVICE CONSTITUTED OF IT, EXPOSURE DEVICE, OPTICAL ELEMENT COMPOSED OF THE SYSTEM, AND INFORMATION PROCESSOR |
摘要 |
PROBLEM TO BE SOLVED: To provide a probe that can be improved in evanescent light generat ing efficiency, in strength, and also in yield and productivity even when a lens is provided in the probe and detects or projects evanescent light, and to provide a method of manufacturing the probe, a surface observation device constituted of the probe, an exposure device, an optical element composed of the system, and an information processor. SOLUTION: The probe which detects or projects evanescent light is constituted of a member having a plumb-like through hole and an aspheric lens provided in the through hole. The probe is manufactured by the method. |
申请公布号 |
JP2002286616(A) |
申请公布日期 |
2002.10.03 |
申请号 |
JP20010083874 |
申请日期 |
2001.03.22 |
申请人 |
CANON INC |
发明人 |
YAMADA TOMOHIRO;SHIMADA YASUHIRO |
分类号 |
G01Q60/18;G01Q60/22;G01Q80/00;G11B7/135;G11B7/22;G11B7/26;H01L21/027 |
主分类号 |
G01Q60/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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