发明名称 |
Composition for preparing substances having nano-pores |
摘要 |
The present invention provides a composition for preparing substances having nano-pores, said composition comprising cyclodextrin derivative, thermostable organic or inorganic matrix precursor, and solvent for dissolving said two solid components. There is also provided an interlayer insulating film having evenly distributed nano-pores with a diameter less than 50 ANGSTROM , which is required for semiconductor devices. |
申请公布号 |
EP1245628(A1) |
申请公布日期 |
2002.10.02 |
申请号 |
EP20010309616 |
申请日期 |
2001.11.14 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
YIM, JIN HEONG;MAH, SANG KOOK;LYU, YI YEOL;NAH, EUN JU |
分类号 |
C08B37/16;B82B3/00;C08K5/54;C08L5/16;C08L83/04;C08L101/00;H01L21/312;H01L21/316;H01L21/768;H01L23/522 |
主分类号 |
C08B37/16 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|