发明名称 |
Verfahren und Einrichtung zur Erzeugung von UV-Strahlung, insbesondere von EUV-Strahlung |
摘要 |
The invention relates to a method for generating EUV radiation. Laser pulses are directed onto photoelectric transducer means (10), which generate pulses of electrically charged particles (6) as a result of the action of the laser pulses. The electrically charged particles are accelerated in an electric field and directed onto a target (4), in such a way that the target generates a plasma, which emits EUV radiation, as a result of the action of the electrically charged particles.
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申请公布号 |
DE10113064(A1) |
申请公布日期 |
2002.10.02 |
申请号 |
DE2001113064 |
申请日期 |
2001.03.15 |
申请人 |
LZH LASERZENTRUM HANNOVER E.V. |
发明人 |
CHICHKOV, BORIS N.;EGBERT, ANDRE |
分类号 |
H05G2/00;(IPC1-7):H05G2/00;H05H1/46;G03F7/20 |
主分类号 |
H05G2/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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