| 摘要 |
A method for planarizing a material surface by providing a suspension of solid abrasive particles in liquid suspension of medium density dm which is within 2 to 15% of the substantially constant solid density ds. The solid abrasive particles are thus generally freely and stably suspended in the suspension liquid n medium. Damage to the grinding and polishing qualities of the solid particles is minimized through reduced contact and collisions of the solid particles on one another.
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