| 摘要 |
<p>A freely rotatable microelectromechanical mirrow and mirror array. Each mirror (101) is connected to a plate (102) flexibly suspended from a plurality of actuators (106) by a plurality of plate flexures. The actuators are flexibly suspended from a support structure by a plurality of actuator flexures. The support structure is held above and electrically isolated from a reference layer (110) by a plurality of standoff posts. The reference layer contains a plurality of actuation means such as control electrodes (108, 109) to move the actuators in first and second directions when actuated. Control voltages can be selectively applied to selective control electrodes to selectively move the actuators, and extend the plurality of plate flexures (104, 105). The extended plate flexures create a net restoring force or torque to translate or rotate the freely movable plate. The plate and attached mirror are thereby translated or rotated about an arbitrary axis or rotation without stress.</p> |
