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发明名称
CASSETTA DI TRASPORTO DI WAFER DI SEMICONDUTTORE
摘要
申请公布号
IT1313979(B1)
申请公布日期
2002.09.26
申请号
IT1999MI02262
申请日期
1999.10.29
申请人
STMICROELECTRONICS S.A.
发明人
DECAMPS PASCAL;ROCHET ANDRE';GARDELLIN DANIEL
分类号
H01L21/673
主分类号
H01L21/673
代理机构
代理人
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