发明名称 |
METHOD AND APPARATUS FOR PERFORMING OPTICAL MEASUREMENTS OF LAYERS AND SURFACE PROPERTIES |
摘要 |
The method and apparatus are capable of performing precise optical measurements of layers and surface properties (SB, SF) both transparent and also non-transparent substrates. A field stop aperture (11) in a confocal optical configuration is used to define the illumination area, and another aperture (13) is used to accept light reflected form the front (SF), or other surface, of a sample being analyzed, while blocking or rejecting the ghost reflection from the backside (SB) or other feature below the focal plane of the surface being analyzed.
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申请公布号 |
WO0120252(A9) |
申请公布日期 |
2002.09.26 |
申请号 |
WO2000US25377 |
申请日期 |
2000.09.15 |
申请人 |
ON-LINE TECHNOLOGIES, INC. |
发明人 |
ROSENTHAL, PETER, A.;XU, JIAZHAN |
分类号 |
G01N21/35;G01B11/06;G01N21/21;G01N21/27;G01N21/33;H01L21/66;(IPC1-7):G01B9/02 |
主分类号 |
G01N21/35 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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