发明名称 |
ARMATURE UNIT, MOTOR, STAGE DEVICE, EXPOSURE DEVICE, AND METHOD OF MANUFACTURING DEVICE |
摘要 |
A low cost armature unit capable of reducing the generated amount of eddy current in a cabinet (cooling jacket) covering coils and hard to deteriorate even if exposed to a high energy light beam, a motor, a stage device, an exposure device, and a method of manufacturing a device; the armature unit, comprising coils (31) and the cabinet (32) for storing the coils therein, wherein flow passages (33) for cooling medium are formed between the coils and the cabinet, and the portions of the cabinet receiving magnetic field from an external magnetism generating body are formed with a radiationproof nonconductive material (32a).
|
申请公布号 |
WO02075905(A1) |
申请公布日期 |
2002.09.26 |
申请号 |
WO2002JP02304 |
申请日期 |
2002.03.12 |
申请人 |
NIKON CORPORATION;TANAKA, TOSHIHISA |
发明人 |
TANAKA, TOSHIHISA |
分类号 |
H01L21/027;G03F7/20;H02K9/19;H02K41/02;H02K41/03;(IPC1-7):H02K41/03 |
主分类号 |
H01L21/027 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|