Production of niobium or tantalum penta-alcoholate for use in chemical vapor deposition, comprises dissolution of the corresponding metal pentachloride at low temperature in alkanol containing excess ammonia

摘要

Niobium (V) and tantalum (V) alcoholates (I), produced by dissolving the corresponding metal pentachloride at 0-(-50) deg C under inert gas in 1-5C alkanol containing 5-7 moles ammonia per mol metal pentachloride, are new. Production of niobium (V) and tantalum (V) alcoholates of formula (I) comprises dissolving niobium or tantalum pentachloride with a 1-5C alcohol containing 5-7 moles ammonia per mol metal chloride at 0-(-50) deg C under inert gas. M(OR)5 (I) M = Nb or Ta; and R = 1-5C alkyl.