| 摘要 |
There is provided an alignment method of an opposing layout substrate and a device for surely preventing that the internal surface of the substrates (alignment film) is damaged even when the spacer provided between the substrates has a kind of grain size. In the alignment method of opposing layout substrate which performs alignment of two substrates under the condition that the particle material is provided between two substrates provided opposed with each other, the alignment is performed under the condition that a recessed area is formed to at least one opposing surface of two substrates.
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