发明名称 Integrated circuit interconnect shunt layer
摘要 An integrated circuit and manufacturing method therefor is provided for an integrated circuit on a semiconductor substrate grated circuit having a semiconductor device. A dielectric layer is on the semiconductor substrate and has an opening provided therein. A barrier layer lines the opening, and a first conductor core fills the opening over the barrier layer. A second dielectric layer is formed on the first dielectric layer and has a second channel and via opening provided therein. A shunt layer is in the via opening above the conductor core. A barrier layer lines the second channel and via opening over the shunt layer and the second dielectric layer. A conductor core fills the second channel and via opening over the barrier layer and the first conductor core to form the second channel and via.
申请公布号 US6455938(B1) 申请公布日期 2002.09.24
申请号 US20010905479 申请日期 2001.07.13
申请人 ADVANCED MICRO DEVICES, INC. 发明人 WANG PIN-CHIN CONNIE;MARATHE AMIT P.;WOO CHRISTY MEI-CHU
分类号 H01L23/522;(IPC1-7):H01L29/45 主分类号 H01L23/522
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