SUBSTRATE TRANSFER APPARATUS AND ALIGNER

摘要

PROBLEM TO BE SOLVED: To detect discharge phenomenon with high sensitivity, during the transfer of a substrate. SOLUTION: A substrate transfer apparatus 4 for transferring a substrate P, includes a connection 15 for connecting a support 12 for supporting the substrate P and a grounding potential 16 and a detector 17 for detecting changes in the electrical characteristics of the connection 15.