| 摘要 |
<p>PROBLEM TO BE SOLVED: To perform treatment, such as exposure, etc., on a substrate, without producing a defective substrate by suppressing excessive electrification, even when the substrate stays on a substrate holder. SOLUTION: When the substrate stays on the substrate holder over a long time, the vacuum-chucking force of the holder exerted for holding the substrate is canceled or weakened. Alternatively, a non-contacting state is produced between the substrate holder and substrate by canceling the vacuum-holding force, and at the same time, lifting the substrate by means of a substrate-lifting/ lowering mechanism.</p> |
