摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an original optical disk which is capable of forming uniform patterns with little land roughness and without the shape slackening of a groove bottom. SOLUTION: The original optical disk manufacturing method comprises a first step of forming an under-layer made of a non-photosensitive water-soluble resin on a glass substrate, a second step of forming an upper-layer made of a photosensitive layer on the under-layer, a third step of exposing a predetermined pattern on the upper-layer by condensing a laser beam and forming a latent image, a fourth step of forming a pattern by exposure on the upper- layer by developing, and washing an upper-layer photoresist layer by pure water, a fifth step of forming a pattern on the under-layer of the substrate by an optical ozone ashing method with the upper-layer used as a mask, and a sixth step of peeling off the upper-layer. The time of developing the upper- layer photoresist layer is set to >=30 sec to <=120 sec.
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