| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum processing apparatus which can have a large layout flexibility of a vacuum processing chamber or a cassette chamber and have a high space efficiency, and also to suppress scattering of particles during operation of a transfer means. SOLUTION: When a transfer means 5 as an articulated arm which is turned in the horizontal direction respectively independently and made of, e.g. three arms 51 to 53 is provided within a transfer chamber 2 having a vacuum atmosphere set therein, a transfer chamber 2 is set as a rectangular parallelopiped shape, and vacuum processing chambers 4A to 4C and cassette chambers 3A and 3B can be arranged around the chamber 2. In this case, it is preferable that, for example, two vacuum processing chambers 4A and 4B be connected airtightly to one side of the transfer chamber 2 and that vacuum processing chambers 4C and 4D be connected airtightly to another side opposed to the side thereof. |
