发明名称 |
DEVICE FOR DRYING SUBSTRATES |
摘要 |
The invention relates to a device for drying disk substrates (3) by means of exposure to ultraviolet light. A glass plate (11) lies on the disk substrate (3) during this process. The aim of the invention is to provide simple technical means for ensuring a low level of waste and a better quality disk substrate with a device which is easy to handle. To this end, the inventive device has an upper part (6) which can be raised and lowered, for lowering t he glass plate onto the disk substrate (3), said disk substrate lying on a lowe r part (23).
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申请公布号 |
CA2288124(C) |
申请公布日期 |
2002.09.17 |
申请号 |
CA19982288124 |
申请日期 |
1998.05.14 |
申请人 |
STEAG HAMATECH AG |
发明人 |
WEBER, KLAUS;SPEER, ULRICH |
分类号 |
F26B3/04;F26B3/28;F26B15/04;G11B7/26;(IPC1-7):G11B7/26 |
主分类号 |
F26B3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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