| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating method capable of thinly and uniformly coating a coating liquid on the surface of a substrate in a short time. SOLUTION: A slit nozzle 6 is faced on the one end of a glass substrate W. The slit nozzle 6 is moved in parallel with the glass substrate W while ejecting the coating liquid 10 from the slit nozzle 6 to roughly coat the coating liquid 10 on the approximately whole area of the surface of the glass board W. After that, the glass board W is simultaneously rotated by rotating an inner cup 2 to uniformly diffuse the coating liquid which has been applied on the surface. |
