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发明名称
Sputterkathode
摘要
申请公布号
DE19747923(C2)
申请公布日期
2002.09.12
申请号
DE19971047923
申请日期
1997.10.30
申请人
LEYBOLD SYSTEMS GMBH
发明人
ADAM, ROLF;BAEHR, MARTIN;KREMPEL-HESSE, JOERG
分类号
C23C14/35;H01J37/34;(IPC1-7):H01J37/34;C23C14/34
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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