发明名称 |
Toroidal low-field reactive gas source |
摘要 |
An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.
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申请公布号 |
US2002125225(A1) |
申请公布日期 |
2002.09.12 |
申请号 |
US20020143061 |
申请日期 |
2002.05.10 |
申请人 |
APPLIED SCIENCE & TECHNOLOGY, INC. |
发明人 |
SMITH DONALD K.;CHEN XING;HOLBER WILLIAM M.;GEORGELIS ERIC |
分类号 |
H05H1/46;H01J27/16;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):B23K10/00 |
主分类号 |
H05H1/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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