| 摘要 |
PROBLEM TO BE SOLVED: To provide an assembly of titanium target for sputtering having a high jointing strength and jointing soundness, and a manufacturing method therefor. SOLUTION: This assembly has a coated film of silver or a silver alloy on the cleaned surface at a jointing side of a target, or at the both jointing sides of the target and a backing plate consisting of copper or a copper alloy, and comprises that the target and the backing plate are solid-phase diffusion jointed, making the surface having the coated film as a jointing surface. The manufacturing method comprises steps of; cleaning the surface of the jointing side; forming the coating on the cleaned surface at the jointing side; and solid- phase diffusion jointing the target and the backing plate in 0.1 Pa or less, at a temperature of 400 deg.C or more and 450 deg.C or less, under a jointing load of 40 MPa or more and 100 MPa or less, within two hours, while making the surface with the coated film as the jointing surface.
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